Extract job failed-The process cannot access the file because it is being used by another process

We just upgraded our tableau server from 2021.1.0 to 2021.2.1. Most extracts work fine. But some embeded extract always failed with error message "This job failed after running for 4.6 min because of: java.lang.RuntimeException: java.nio.file.FileSystemException: E:\Program Files\Tableau\Tableau Server\data\tabsvc\temp\backgrounder_0.20212.21.0712.0907\extracts1738170143403511451\federated_0suul840qy33zs12ei3lr0.hyper -> E:\Program Files\Tableau\Tableau Server\data\tabsvc\temp\backgrounder_0.20212.21.0712.0907\noopk0Y3qpWpFS\extract_{6797560B-B56A-4058-B566-F8EBE2C5944B}_0lEMDm6KQW\federated_0suul840qy33zs12ei3lr0.hyper: The process cannot access the file because it is being used by another process"

Any ideas? Tks